In this paper we present the design and fabrication of two flexible sensor devices: humidity sensor and ammonia sensor integrated with electronic circuit interface on thin flexible substrate (8 mum). The transducers layout has been optimized by means of numerical simulations. A thin layer of Bisbenzocyclobytene (BCB) is used as dielectric sensitive material in humidity sensor. Conversely a mixed polymer layer based on polyaniline emeraldine base (PANi-EB) is used as sensing conductive polymer for ammonia.

Interdigitated sensorial system on flexible substrate

Pecora A;E Zampetti;S Pantalei;A Valletta;L Maiolo;DSimeone;A Bearzotti;A Macagnano;L Mariucci;G Fortunato
2008

Abstract

In this paper we present the design and fabrication of two flexible sensor devices: humidity sensor and ammonia sensor integrated with electronic circuit interface on thin flexible substrate (8 mum). The transducers layout has been optimized by means of numerical simulations. A thin layer of Bisbenzocyclobytene (BCB) is used as dielectric sensitive material in humidity sensor. Conversely a mixed polymer layer based on polyaniline emeraldine base (PANi-EB) is used as sensing conductive polymer for ammonia.
2008
Istituto per la Microelettronica e Microsistemi - IMM
978-1-4244-2580-8
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/69346
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