In this paper we present the design and fabrication of two flexible sensor devices: humidity sensor and ammonia sensor integrated with electronic circuit interface on thin flexible substrate (8 mum). The transducers layout has been optimized by means of numerical simulations. A thin layer of Bisbenzocyclobytene (BCB) is used as dielectric sensitive material in humidity sensor. Conversely a mixed polymer layer based on polyaniline emeraldine base (PANi-EB) is used as sensing conductive polymer for ammonia.

Interdigitated sensorial system on flexible substrate

Pecora A;E Zampetti;S Pantalei;A Valletta;L Maiolo;DSimeone;A Bearzotti;A Macagnano;L Mariucci;G Fortunato
2008

Abstract

In this paper we present the design and fabrication of two flexible sensor devices: humidity sensor and ammonia sensor integrated with electronic circuit interface on thin flexible substrate (8 mum). The transducers layout has been optimized by means of numerical simulations. A thin layer of Bisbenzocyclobytene (BCB) is used as dielectric sensitive material in humidity sensor. Conversely a mixed polymer layer based on polyaniline emeraldine base (PANi-EB) is used as sensing conductive polymer for ammonia.
2008
Istituto per la Microelettronica e Microsistemi - IMM
Inglese
Sensors, 2008 IEEE
7th IEEE Conference on Sensors – IEEE SENSORS 2008
21
24
978-1-4244-2580-8
Sì, ma tipo non specificato
Oct. 26-29 2008
Lecce (Italy)
11
none
Pecora A.; E. Zampetti; S. Pantalei; A. Valletta; A.Minotti; L. Maiolo; D.Simeone; M. Cuscunà; A. Bearzotti; A. Macagnano; L. Mariucci;G. Fortunato...espandi
273
info:eu-repo/semantics/conferenceObject
04 Contributo in convegno::04.01 Contributo in Atti di convegno
File in questo prodotto:
Non ci sono file associati a questo prodotto.

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/69346
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus 10
  • ???jsp.display-item.citation.isi??? ND
social impact