Microstructural and optical properties of sol-gel silica-titania waveguides

Two micron silica-titania coatings made by single step sol-gel dip-coating were prepared as planar waveguides. Acid catalyzed solutions of methyltriethoxysilane (MTES) mixed with tetraethoxysilane (TEOS) and tetrabutoxytitanate were used as precursors. Purely inorganic and crackfree silica-titania coatings were obtained after annealing at 500°C. The waveguides had propagation losses, 0.3 dB/cm, of the same order as thin silica-titania films prepared without MTES. Films were studied by infrared speetroscopy, Rutherford backscattering spectrometry, nuclear reactions analysis and elastic recoil detection analysis. The waveguide structural composition after annealing at 500°C was found to be similar to MTES and TEOS derived silica-titania coatings. The waveguides were characterized by measuring refractive index, porosity and shrinkage, with thermal treatment. The MTES derived films showed a higher shrinkage during annealing but the same refractive index and porosity as the TEOS derived waveguides.