An optical model for Raman response of thin metal films has been developed, taking into account attenuation effects and multi-reflections occurring at film edges. Film thickness and surface morphology of nanometer thin NbN films have been inferred in the framework of this model using micro-Raman measurements. Results have been compared with those obtained by means of spectroscopic ellipsometry. The absolute value of the thickness is determined with a precision better than 20% on nanometric scale allowing us to control surface morphology with high accuracy also on large areas.
Evaluation of thin metal film thickness from light attenuation and multi-reflection effects on micro-Raman response
C Camerlingo;L De Stefano;I Rea;
2013
Abstract
An optical model for Raman response of thin metal films has been developed, taking into account attenuation effects and multi-reflections occurring at film edges. Film thickness and surface morphology of nanometer thin NbN films have been inferred in the framework of this model using micro-Raman measurements. Results have been compared with those obtained by means of spectroscopic ellipsometry. The absolute value of the thickness is determined with a precision better than 20% on nanometric scale allowing us to control surface morphology with high accuracy also on large areas.File in questo prodotto:
Non ci sono file associati a questo prodotto.
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
