Plasma deposition of a-Si,Ge:H,F films from SiF4-GeH4-H2 mixture, has been investigated by applying a square wave modulation to the r.f. field. The effects of plasma modulation on the thickness and compositional uniformity and on the increase of Ge and H incorporation in the film are reported. A twophases model for the conduction mechanism is preliminarily discussed.

Deposition of silicon-germanium alloys under plasma modulation conditions

Losurdo M;Cicala G
1991

Abstract

Plasma deposition of a-Si,Ge:H,F films from SiF4-GeH4-H2 mixture, has been investigated by applying a square wave modulation to the r.f. field. The effects of plasma modulation on the thickness and compositional uniformity and on the increase of Ge and H incorporation in the film are reported. A twophases model for the conduction mechanism is preliminarily discussed.
1991
Istituto di Nanotecnologia - NANOTEC
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Descrizione: Cicala JNCS137-138(1991)753
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/121874
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