A brief historical survey evidences the key role of the plasma processing in the development of the "modern" semiconductor material technologies (microelectronics, photovoltaics, optoelectronics). Our recent experiments show that the knowledge of the plasma-surface interaction is determinant to elucidate the interplay of material science and technology.
Plasma deposition and treatment of semiconductor materials
G Cicala;M Losurdo
1998
Abstract
A brief historical survey evidences the key role of the plasma processing in the development of the "modern" semiconductor material technologies (microelectronics, photovoltaics, optoelectronics). Our recent experiments show that the knowledge of the plasma-surface interaction is determinant to elucidate the interplay of material science and technology.File in questo prodotto:
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