Convergent beam electron diffraction is a technique available in any modern transmission electron microscope. It allows the determination of the strain tensor in crystals at the nanometer scale. The basic principles of the method and examples of application to microelectronic devices are given.
Analysis of localised strains in crystals by convergent beam electron diffraction
Armigliato A;Balboni R;
2004
Abstract
Convergent beam electron diffraction is a technique available in any modern transmission electron microscope. It allows the determination of the strain tensor in crystals at the nanometer scale. The basic principles of the method and examples of application to microelectronic devices are given.File in questo prodotto:
Non ci sono file associati a questo prodotto.
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
