charging effect in dielectrics are considered the major limiting factor for reliability of RF MEMS. Modeling is proposed for charging by using lumped elements too.
Charging Effects and related Equivalent Circuits for Ohmic Series and Shunt Capacitive RF MEMS Switches
Romolo Marcelli;Giancarlo Bartolucci;Andrea Lucibello;Emanuela Proietti;
2009
Abstract
charging effect in dielectrics are considered the major limiting factor for reliability of RF MEMS. Modeling is proposed for charging by using lumped elements too.File in questo prodotto:
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