We propose a comparison among different solutions for realizing polysilicon thermoelectric transducers, with five different types of thermoelements based on Al/polysilicon and two level polysilicon design, using different doping (of p and n-type) for the poly layers. The device performances are evaluated on a test geometry with electrical measurements and the performance obtained with the various solutions are compared.
A comparison among different technological processes for the fabrication of polysilicon-based thermoelectric transducers
Mancarella F;Roncaglia A;Tamarri F;Elmi I;Cardinali GC;Severi M
2006
Abstract
We propose a comparison among different solutions for realizing polysilicon thermoelectric transducers, with five different types of thermoelements based on Al/polysilicon and two level polysilicon design, using different doping (of p and n-type) for the poly layers. The device performances are evaluated on a test geometry with electrical measurements and the performance obtained with the various solutions are compared.File in questo prodotto:
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