Epitaxial YBa2Cu3O(x) superconducting films have been grown in-situ by XeCl excimer laser ablation of a sintered pellet. The films, 1000-1500 angstrom thick, were deposited on monocrystalline SrTiO3, LaAlO3, MgO and YSZ substrates. X-ray diffraction and RBS-channeling techniques were used for the structural analysis of the substrates and of the films.

STRUCTURAL CHARACTERIZATION OF SUPERCONDUCTING YBA2CU3OX FILMS GROWN BY PULSED LASER ABLATION

BIANCONI M;NIPOTI R;SERVIDORI M;
1991

Abstract

Epitaxial YBa2Cu3O(x) superconducting films have been grown in-situ by XeCl excimer laser ablation of a sintered pellet. The films, 1000-1500 angstrom thick, were deposited on monocrystalline SrTiO3, LaAlO3, MgO and YSZ substrates. X-ray diffraction and RBS-channeling techniques were used for the structural analysis of the substrates and of the films.
1991
Istituto per la Microelettronica e Microsistemi - IMM
THIN-FILMS
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/204058
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