We investigated the quantum confinement in Si nanocrystals embedded in a SiO2 matrix. The size was accurately controlled in the range 3-8 nm by annealing at high temperature Si/SiO2 multilayers fabricated by chemical vapour deposition. Raman shift and line width were compared with existing theoretical models for each cluster size. We found evidence of uni-dimensional confinement in 3 nm crystals, whereas for 4.5 nm crystals the confinement appears three-dimensional. This conclusion is supported by the luminescence spectra shifting towards higher wavelengths for the smaller size, in opposite direction for larger sizes.

Raman and photoluminescence spectroscopy of Si nanocrystals: Evidence of a form factor

G Mannino;R Ruggeri;V Privitera
2013

Abstract

We investigated the quantum confinement in Si nanocrystals embedded in a SiO2 matrix. The size was accurately controlled in the range 3-8 nm by annealing at high temperature Si/SiO2 multilayers fabricated by chemical vapour deposition. Raman shift and line width were compared with existing theoretical models for each cluster size. We found evidence of uni-dimensional confinement in 3 nm crystals, whereas for 4.5 nm crystals the confinement appears three-dimensional. This conclusion is supported by the luminescence spectra shifting towards higher wavelengths for the smaller size, in opposite direction for larger sizes.
2013
Istituto per la Microelettronica e Microsistemi - IMM
Istituto per la Microelettronica e Microsistemi - IMM
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/204769
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