Silicon grisms are very attractive devices as they allow for a spectroscopic mode able to effectively complement the natural imaging mode of IR cameras, providing high spectral resolution. In this paper we describe progress toward the realization of silicon grisms by means of micromachining techniques.
Micromachined silicon grisms for high resolution spectroscopy in the near infrared
E Giovine
2000
Abstract
Silicon grisms are very attractive devices as they allow for a spectroscopic mode able to effectively complement the natural imaging mode of IR cameras, providing high spectral resolution. In this paper we describe progress toward the realization of silicon grisms by means of micromachining techniques.File in questo prodotto:
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