Aim of the present work is the deposition of high quality a-SiC:H films by a new designed Ultra High Vacum PECVD System, with and without hydrogen dilution, the study of their optoelectronic properties and their inclusion in p-i-n structures such as photovoltaic solar cells and light emitting devices.
High quality a-SiC:H films and their application in p-i-n structures for optoelectronic devices
R Rizzoli;C Summonte;
1995
Abstract
Aim of the present work is the deposition of high quality a-SiC:H films by a new designed Ultra High Vacum PECVD System, with and without hydrogen dilution, the study of their optoelectronic properties and their inclusion in p-i-n structures such as photovoltaic solar cells and light emitting devices.File in questo prodotto:
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