A Micro-Opto-Mechanical-System (MOMS) based technology for the fabrication of Fabry-Perot interferometers on optical fiber is presented. Exploiting silicon micromachining techniques, the fabrication of ultrasonic receiver arrays suitable for wideband and high performance applications is demonstrated. Thanks to their high miniaturization level, the devices presented may be suited to minimally invasive endoscopic applications in medicine. The devices are based on the use of a SU-8 polymer interferometer manufactured on a micromachined silicon frame whose thickness can be modulated by the incoming ultrasound waves. In this way, the ultrasonic detection is performed by measuring the Fabry-Perot thickness modulation from the variation of the reflected intensity of a fiber-driven continuous laser beam hitting the interferometer.

Micro-Opto-Mechanical technology for the fabrication of highly miniaturized fiber-optic ultrasonic detectors

Belsito;La;Mancarella;Ferri;Ma;Roncaglia;Lb;Nc
2011

Abstract

A Micro-Opto-Mechanical-System (MOMS) based technology for the fabrication of Fabry-Perot interferometers on optical fiber is presented. Exploiting silicon micromachining techniques, the fabrication of ultrasonic receiver arrays suitable for wideband and high performance applications is demonstrated. Thanks to their high miniaturization level, the devices presented may be suited to minimally invasive endoscopic applications in medicine. The devices are based on the use of a SU-8 polymer interferometer manufactured on a micromachined silicon frame whose thickness can be modulated by the incoming ultrasound waves. In this way, the ultrasonic detection is performed by measuring the Fabry-Perot thickness modulation from the variation of the reflected intensity of a fiber-driven continuous laser beam hitting the interferometer.
2011
Istituto per la Microelettronica e Microsistemi - IMM
9781457701573
Continuous lasers
Endoscopic applications
Fabry-Perot
High performance applications
Micromachined silicon
Minimally invasive
MOMS
Silicon micromachining
SU-8 polymer
Ultrasonic detection
Ultrasonic detectors
Ultrasonic receivers
Ultrasound waves
Wide-band
Actuators
Fabry-Perot interferometers
Fiber optic sensors
Fibers
Microsystems
Optical fibers
Solid-state sensors
Ultrasonic devices
Ultrasonic testing
Ultrasonics
Optical fiber fabrication
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/272844
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