In this work we report the growth of C-based nanostructures by means of radio-frequency (RF) magnetron sputtering at different temperatures. We found that the deposition temperature has a huge influence on the structure and chemical composition of the C-based materials obtained. In the temperature range 400°C-600°C we obtain nanocolumns made of carbon and nitrogen (CNx), due to the incorporation of the sputtering gas, whilst at a deposition temperature of 700°C the formation of carbon nanotubes (CNT) takes place. The effect of thermal processes on the morphology and the chemical composition of the grown C nanostructures has been investigated by Scanning Electron Microscopy, Transmission Electron microscopy and Raman Spectroscopy

Role of Temperature on the Morphology and the Chemical Composition of C-based Nanostructures: From Nanocolumns to Nanotubes

Scalese S;Scuderi V;
2007

Abstract

In this work we report the growth of C-based nanostructures by means of radio-frequency (RF) magnetron sputtering at different temperatures. We found that the deposition temperature has a huge influence on the structure and chemical composition of the C-based materials obtained. In the temperature range 400°C-600°C we obtain nanocolumns made of carbon and nitrogen (CNx), due to the incorporation of the sputtering gas, whilst at a deposition temperature of 700°C the formation of carbon nanotubes (CNT) takes place. The effect of thermal processes on the morphology and the chemical composition of the grown C nanostructures has been investigated by Scanning Electron Microscopy, Transmission Electron microscopy and Raman Spectroscopy
2007
Istituto per la Microelettronica e Microsistemi - IMM
File in questo prodotto:
Non ci sono file associati a questo prodotto.

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/29619
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus ND
  • ???jsp.display-item.citation.isi??? ND
social impact