This paper presents the design of distributed MEMS phase shifters by means of the image-parameters method. The proposed analytic approach utilizes a more precise modeling of the MEMS device with respect to that one usually adopted in literature. The most important analytic aspects concerning the synthesis technique are presented. As a demonstration of the method a structure characterized by a differential phase shift value of 90° is designed and simulated, exhibiting very good electric performance.

Analytic design method for distributed RF MEMS phase shifters

Lucibello A;Proietti E;Marcelli R;Bartolucci G;
2014

Abstract

This paper presents the design of distributed MEMS phase shifters by means of the image-parameters method. The proposed analytic approach utilizes a more precise modeling of the MEMS device with respect to that one usually adopted in literature. The most important analytic aspects concerning the synthesis technique are presented. As a demonstration of the method a structure characterized by a differential phase shift value of 90° is designed and simulated, exhibiting very good electric performance.
2014
Istituto per la Microelettronica e Microsistemi - IMM
distributed phase shifter
image parameter
MEMS varactor
microwave
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/304601
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