A broad review of the different forms of 3C-SiC on silicon is presented in this chapter.
SiC Films and Coatings: Amorphous, Polycrystalline, and Single Crystal Forms
La Via F;
2012
Abstract
A broad review of the different forms of 3C-SiC on silicon is presented in this chapter.File in questo prodotto:
Non ci sono file associati a questo prodotto.
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.