The design and realization of a simple and reliable convertible diode/magnetron deposition system allowing the in situ production of both high-T-c superconducting oxide films and low-T-c superconducting metallic films is presented. The ability to produce high-quality double-sided in situ films with uniform characteristics over 2 " diameter targets is demonstrated. This apparatus can represent a valid alternative to more sophisticated, less flexible deposition systems and is well suited for application in the large-scale production of superconducting filters for wireless communications.
A simple and reliable system for in situ deposition of large-area double-sided, superconducting films
POrgiani;MSalluzzo;
2000
Abstract
The design and realization of a simple and reliable convertible diode/magnetron deposition system allowing the in situ production of both high-T-c superconducting oxide films and low-T-c superconducting metallic films is presented. The ability to produce high-quality double-sided in situ films with uniform characteristics over 2 " diameter targets is demonstrated. This apparatus can represent a valid alternative to more sophisticated, less flexible deposition systems and is well suited for application in the large-scale production of superconducting filters for wireless communications.File in questo prodotto:
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