The electrical properties and the structure of isothermally annealed thin films of Ge2+xSb2Te5 (x=0 and 0.5) have been studied by in situ electrical measurements, x-ray diffraction, and transmission electron microscopy analyses. Phase separation has been observed in samples with an excess of Ge; by annealing amorphous Ge2.5Sb2Te5 films at temperatures in the range 130-160 degreesC, the material cannot be completely converted into the metastable face-centered-cubic (fcc) structure. At temperatures higher than 160 degreesC, the residual amorphous material may be converted into a fcc structure with a lower lattice parameter.

Crystallization and phase separation in Ge2+xSb2Te5 thin films

Privitera S;Bongiorno C;
2003

Abstract

The electrical properties and the structure of isothermally annealed thin films of Ge2+xSb2Te5 (x=0 and 0.5) have been studied by in situ electrical measurements, x-ray diffraction, and transmission electron microscopy analyses. Phase separation has been observed in samples with an excess of Ge; by annealing amorphous Ge2.5Sb2Te5 films at temperatures in the range 130-160 degreesC, the material cannot be completely converted into the metastable face-centered-cubic (fcc) structure. At temperatures higher than 160 degreesC, the residual amorphous material may be converted into a fcc structure with a lower lattice parameter.
2003
Istituto per la Microelettronica e Microsistemi - IMM
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/437724
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