The deposition of (100)-oriented platinum films on Hastelloy C276 from platinum acetylacetonate was studied. The (100)-oriented Pt films showed a well-defined crystalline structure with 100 nm wide grains. The thickness of the columnar crystallites was about 2000 nm. The average roughness of the Pt (100)-oriented films was about 100 nm.
MOCVD of platinum (100) oriented films on random Hastelloy C 276
R Lo Nigro;
1999
Abstract
The deposition of (100)-oriented platinum films on Hastelloy C276 from platinum acetylacetonate was studied. The (100)-oriented Pt films showed a well-defined crystalline structure with 100 nm wide grains. The thickness of the columnar crystallites was about 2000 nm. The average roughness of the Pt (100)-oriented films was about 100 nm.File in questo prodotto:
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