Strain, Young’s modulus, and structural transition of EuTiO3 thin films probed by micro-mechanical methods

EuTiO3 (ETO) is a well-known complex oxide mainly investigated for its magnetic properties and its incipient ferro-electricity. In this work, we demonstrate the realization of suspended micro-mechanical structures, such as cantilevers and micro-bridges, from 100 nm-thick single-crystal epitaxial ETO films deposited on top of SrTiO3(100) substrates. By combining profile analysis and resonance frequency measurements of these devices, we obtain the Young’s modulus, strain, and strain gradients of the ETO thin films. Moreover, we investigate the ETO anti-ferro-distortive transition by temperature-dependent characterizations, which show a non-monotonic and hysteretic mechanical response. The comparison between experimental and literature data allows us to weight the contribution from thermal expansion and softening to the tuning slope, while a full understanding of the origin of such a wide hysteresis is still missing. We also discuss the influence of oxygen vacancies on the reported mechanical properties by comparing stoichiometric and oxygen-deficient samples.