The electrical resistivity and Hall coefficient of C49, C40, and C54 TiSi2 thin films were studied in the temperature range of 4-350 K. The residual resistivity was the highest (52-72 microOhmcm) for the C49 phase, lower for the C40 (22-33 microOhmcm), and the lowest for the C54 phase (2.8-3.8 microOhmcm). On the other hand, the Debye temperature decreases from the C54 phase (470-490 K), to the C49 (451 K), and finally to the C40 phase (420 K). The Hall coefficient of the C49 and C40 phases exhibits a temperature independent value. A change of sign for the Hall coefficient occurs in the case of C54 at a temperature of about 80 K indicating that a multicarrier conduction mechanism exists in C54 TiSi2. The value of the scattering length le for the C54 samples is two to three times larger than for the C49 and C40 samples. This difference in the scattering length is suggested to be due to the presence of intrinsic defects in the C49 and C40 phases and/or to the large amount of grain boundaries.

Electrical resistivity and Hall coefficient of C49, C40, and C54 tisi2 thin-film phases

La Via F
2002

Abstract

The electrical resistivity and Hall coefficient of C49, C40, and C54 TiSi2 thin films were studied in the temperature range of 4-350 K. The residual resistivity was the highest (52-72 microOhmcm) for the C49 phase, lower for the C40 (22-33 microOhmcm), and the lowest for the C54 phase (2.8-3.8 microOhmcm). On the other hand, the Debye temperature decreases from the C54 phase (470-490 K), to the C49 (451 K), and finally to the C40 phase (420 K). The Hall coefficient of the C49 and C40 phases exhibits a temperature independent value. A change of sign for the Hall coefficient occurs in the case of C54 at a temperature of about 80 K indicating that a multicarrier conduction mechanism exists in C54 TiSi2. The value of the scattering length le for the C54 samples is two to three times larger than for the C49 and C40 samples. This difference in the scattering length is suggested to be due to the presence of intrinsic defects in the C49 and C40 phases and/or to the large amount of grain boundaries.
2002
Istituto per la Microelettronica e Microsistemi - IMM
File in questo prodotto:
Non ci sono file associati a questo prodotto.

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/52513
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus ND
  • ???jsp.display-item.citation.isi??? ND
social impact