A rigorous study of the efficiency of internal gettering under different conditions, comparing it to external and p(+) gettering, has shown it to be effective in p(+) substrates with backside polysilicon. This is true when the density of oxygen precipitates is high and their size small. However, internal gettering is not effective for a low density of oxygen precipitates when using either p(+) substrates or polysilicon.
Evaluating the effects of internal gettering in epi Si
Frigeri C;
2003
Abstract
A rigorous study of the efficiency of internal gettering under different conditions, comparing it to external and p(+) gettering, has shown it to be effective in p(+) substrates with backside polysilicon. This is true when the density of oxygen precipitates is high and their size small. However, internal gettering is not effective for a low density of oxygen precipitates when using either p(+) substrates or polysilicon.File in questo prodotto:
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