In this paper, a spectroscopic ellipsometry (SE) study was carried out on V2O5 nanocrystalline thin films grown by plasmaenhanced chemical vapor deposition. Both the real and imaginary part of the complex dielectric function and, hence, therefractive index and absorption coefficients, were described up to a photon energy of 5 eV, taking into account the anisotropy ofvanadium pentoxide and the influence of the films microstructure on the optical properties. A novel approach based on a suitablecombination of Lorentzian oscillators was used to describe the V2O5 optical properties. The effect of experimental parameters,such as deposition temperature and substrate, on the film microstructure and optical properties was investigated.
Spectroscopic Ellipsometry investigation of V2O5 nanocrystalline thin films
M Losurdo;D Barreca;G Bruno;
2001
Abstract
In this paper, a spectroscopic ellipsometry (SE) study was carried out on V2O5 nanocrystalline thin films grown by plasmaenhanced chemical vapor deposition. Both the real and imaginary part of the complex dielectric function and, hence, therefractive index and absorption coefficients, were described up to a photon energy of 5 eV, taking into account the anisotropy ofvanadium pentoxide and the influence of the films microstructure on the optical properties. A novel approach based on a suitablecombination of Lorentzian oscillators was used to describe the V2O5 optical properties. The effect of experimental parameters,such as deposition temperature and substrate, on the film microstructure and optical properties was investigated.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
