In this work we report the growth of C-based nanostructures by means of radio-frequency (RF) magnetron sputtering at different temperatures. We found that the deposition temperature has a huge influence on the structure and chem ical composition of the C-based materials obtained. In the temperature range 400 degrees C-600 degrees C we obtain nanocolumns made of carbon and nitrogen (CN(x),), due to the incorporation of the sputtering gas, whilst at a deposition temperature of 700 degrees C the formation of carbon nanotubes (CNT) takes place. The effect of thermal processes on the morphology and the chemical composition of the grown C nanostructures has been investigated by Scanning Electron Microscopy, Transmission Electron microscopy and Raman Spectroscopy.

Role of Temperature on the Morphology and the Chemical Composition of C-based Nanostructures: From Nanocolumns to Nanotubes

Scalese S;Scuderi V;Privitera V
2007

Abstract

In this work we report the growth of C-based nanostructures by means of radio-frequency (RF) magnetron sputtering at different temperatures. We found that the deposition temperature has a huge influence on the structure and chem ical composition of the C-based materials obtained. In the temperature range 400 degrees C-600 degrees C we obtain nanocolumns made of carbon and nitrogen (CN(x),), due to the incorporation of the sputtering gas, whilst at a deposition temperature of 700 degrees C the formation of carbon nanotubes (CNT) takes place. The effect of thermal processes on the morphology and the chemical composition of the grown C nanostructures has been investigated by Scanning Electron Microscopy, Transmission Electron microscopy and Raman Spectroscopy.
2007
Istituto per la Microelettronica e Microsistemi - IMM
Inglese
15TH IEEE INTERNATIONAL CONFERENCE ON ADVANCED THERMAL PROCESSING OF SEMICONDUCTORS - RTP 2007
15th International Conference on Advanced Thermal Processing of Semiconductors, 2007 (RTP 2007)
123
126
978-1-4244-1227-3
IEEE, 345 E 47TH ST, NY 10017
NEW YORK
STATI UNITI D'AMERICA
Sì, ma tipo non specificato
OCT 02-05, 2007
Catania
6
none
Scalese, S; Scuderi, V; Simone, F; Pennisi, A; Compagnini, G; Privitera, V
273
info:eu-repo/semantics/conferenceObject
04 Contributo in convegno::04.01 Contributo in Atti di convegno
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/69277
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