A novel circuital model for a shunt connected RF MEMS coplanar switch, based on a fully analytical approach, is presented. The numerical simulations performed with the proposed new model are in good agreement with experimental measurements.

Circuital Modelling of Shunt Capacitive RF MEMS Switches

Bartolucci G;Marcelli R;Lucibello A;
2008

Abstract

A novel circuital model for a shunt connected RF MEMS coplanar switch, based on a fully analytical approach, is presented. The numerical simulations performed with the proposed new model are in good agreement with experimental measurements.
2008
Istituto per la Microelettronica e Microsistemi - IMM
978-2-87487-005-7
RF MEMS
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/70232
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