Quantitative analysis of nanometric films is achieved by soft X-ray imaging using a laser-plasma source and LiF crystals as detectors. Excitation of color center fluorescence in exposed LiF allows image detection with sub-micron resolution
Soft X-ray Contact Imaging of Thin Films by a laser plasma source
S Stagira;F Calegari;M Nisoli;G Sansone;G Valentini;C Vozzi;S De Silvestri;L Poletto;P Villoresi;
2007
Abstract
Quantitative analysis of nanometric films is achieved by soft X-ray imaging using a laser-plasma source and LiF crystals as detectors. Excitation of color center fluorescence in exposed LiF allows image detection with sub-micron resolutionFile in questo prodotto:
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