FERRI, MATTEO
FERRI, MATTEO
Istituto per la Microelettronica e Microsistemi - IMM
A packaging technique for silicon MEMS strain sensors on steel
2008 Ferri, M; Cristiani, S; Kobayashi, Y; Soga, K; Roncaglia, A
Arsenic uphill diffusion during shallow junction formation
2006 Ferri, M; Solmi, S; Parisini, A; Bersani, M; Giubertoni, D; Barozzi, M
beta-SiC NWs grown on patterned and MEMS silicon substrates
2011 Watts, BERNARD ENRICO; Bernard Enrico, E; Attolini, Giovanni; Attolini, Giovanni; Rossi, Francesca; Rossi, Francesca; Bosi, Matteo; Bosi, Matteo; Salviati, Giancarlo; Salviati, Giancarlo; Mancarella, Fulvio; Mancarella, Fulvio; Ferri, Matteo; Bosi, Matteo; Roncaglia, Alberto; Roncaglia, Alberto; Poggi, Antonella; Poggi, Antonella
Carbon-cap for Ohmic Contacts on Ion Implanted 4H-SiC
2010 Nipoti R; Mancarella F; Moscatelli F; Rizzoli R; Zampolli S; Ferri M
Crossbar architecture for tera scale integration
2011 Cerofolini GF; Ferri M; Romano E; Suriano F; Veronese GP; Solmi S; Narducci D
Damage and recovery in arsenic doped silicon after high energy Si+ implantation
2004 Solmi, S; Ferri, M; Nobili, D; Bianconi, M
Damage and recovery in boron doped silicon on insulator layers after high energy Si+ implantation
2006 Ferri, M; Solmi, S; Nobili, D; Armigliato, A
Damage and recovery in doped SOI layers after high energy implantation
2004 Ferri, M; Solmi, S; Armigliato, A; Bianconi, M; Lulli, G; Nobili, D
Damage recovery in boron doped silicon on insulator layers after high energy Si+ implantation
2006 M. Ferri; S. Solmi; D. Nobili; A. Armigliato
Epitaxial growth, mechanical and electrical properties of SiC/Si and SiC/poly-Si
2012 Bosi, M; Attolini, G; Watts, Be; Roncaglia, A; Poggi, A; Mancarella, F; Moscatelli, F; Belsito, L; Ferri, M
Fabrication and packaging techniques for the application of MEMS strain sensors to wireless crack monitoring in ageing civil infrastructures
2010 Ferri, M; Mancarella, F; Seshia, A; Ransley, J; Soga, K; Zalesky, J; Roncaglia, A
Fabrication of DETF sensors in SOI technology with submicron air gaps using a maskless line narrowing technique
2008 Ferri M; Mancarella F; Ransley J; Yan J; Seshia A;Roncaglia A
Fabrication of fiber-optic broadband ultrasound emitters by micro-opto-mechanical technology
2014 Belsito, L; Vannacci, E; Mancarella, F; Ferri, M; Veronese, G; Biagi, E; Roncaglia, Alberto; A,
Fabrication of high-resolution strain sensors based on wafer-level vacuum packaged MEMS resonators
2016 Belsito, Luca; Ferri, Matteo; Mancarella, Fulvio; Masini, Luca; Yan, Jize; Seshia, Ashwin A.; Soga, Kenichi; Roncaglia, Alberto
Influence of Grain Size on the Thermoelectric Properties of Polycrystalline Silicon Nanowires
2015 Suriano F;Ferri M;Moscatelli F;Mancarella F;Belsito L;Solmi S;Roncaglia A;Frabboni S;Gazzadi; G C;Narducci; D
Nanograin Effects on the Thermoelectric Properties of Poly-Si Nanowires
2013 Neophytou, N; Zianni, X; Ferri, M; Roncaglia, A; Cerofolini, Gf; Narducci, D
Nanostrain Resolution Strain Sensing by Monocrystalline 3C-SiC on SOI Electrostatic MEMS Resonators
2019 Belsito, L; Bosi, M; Mancarella, F; Ferri, M; Roncaglia, A
Phonon scattering enhancement in silicon nanolayers
2013 Narducci, D; Cerofolini, G; Ferri, M; Suriano, F; Mancarella, F; Belsito, L; Solmi, S; Roncaglia, Alberto; A,
Phonon scattering enhancement in silicon nanolayers
2012 Narducci, Dario; Cerofolini, Gianfranco; Ferri, Matteo; Suriano, Francesco; Mancarella, Fulvio; Belsito, Luca; Solmi, Sandro; Roncaglia, Alberto
RBS channeling analysis of ion irradiation effects in heavily doped Si:As
2006 Lulli, G; Bianconi, M; Ferri, M; Fortunato, G; Mariucci, L
Titolo | Data di pubblicazione | Autore(i) | File |
---|---|---|---|
A packaging technique for silicon MEMS strain sensors on steel | 1-gen-2008 | Ferri, M; Cristiani, S; Kobayashi, Y; Soga, K; Roncaglia, A | |
Arsenic uphill diffusion during shallow junction formation | 1-gen-2006 | Ferri, M; Solmi, S; Parisini, A; Bersani, M; Giubertoni, D; Barozzi, M | |
beta-SiC NWs grown on patterned and MEMS silicon substrates | 1-gen-2011 | Watts, BERNARD ENRICO; Bernard Enrico, E; Attolini, Giovanni; Attolini, Giovanni; Rossi, Francesca; Rossi, Francesca; Bosi, Matteo; Bosi, Matteo; Salviati, Giancarlo; Salviati, Giancarlo; Mancarella, Fulvio; Mancarella, Fulvio; Ferri, Matteo; Bosi, Matteo; Roncaglia, Alberto; Roncaglia, Alberto; Poggi, Antonella; Poggi, Antonella | |
Carbon-cap for Ohmic Contacts on Ion Implanted 4H-SiC | 1-gen-2010 | Nipoti R; Mancarella F; Moscatelli F; Rizzoli R; Zampolli S; Ferri M | |
Crossbar architecture for tera scale integration | 1-gen-2011 | Cerofolini GF; Ferri M; Romano E; Suriano F; Veronese GP; Solmi S; Narducci D | |
Damage and recovery in arsenic doped silicon after high energy Si+ implantation | 1-gen-2004 | Solmi, S; Ferri, M; Nobili, D; Bianconi, M | |
Damage and recovery in boron doped silicon on insulator layers after high energy Si+ implantation | 1-gen-2006 | Ferri, M; Solmi, S; Nobili, D; Armigliato, A | |
Damage and recovery in doped SOI layers after high energy implantation | 1-gen-2004 | Ferri, M; Solmi, S; Armigliato, A; Bianconi, M; Lulli, G; Nobili, D | |
Damage recovery in boron doped silicon on insulator layers after high energy Si+ implantation | 1-gen-2006 | M. Ferri; S. Solmi; D. Nobili; A. Armigliato | |
Epitaxial growth, mechanical and electrical properties of SiC/Si and SiC/poly-Si | 1-gen-2012 | Bosi, M; Attolini, G; Watts, Be; Roncaglia, A; Poggi, A; Mancarella, F; Moscatelli, F; Belsito, L; Ferri, M | |
Fabrication and packaging techniques for the application of MEMS strain sensors to wireless crack monitoring in ageing civil infrastructures | 1-gen-2010 | Ferri, M; Mancarella, F; Seshia, A; Ransley, J; Soga, K; Zalesky, J; Roncaglia, A | |
Fabrication of DETF sensors in SOI technology with submicron air gaps using a maskless line narrowing technique | 1-gen-2008 | Ferri M; Mancarella F; Ransley J; Yan J; Seshia A;Roncaglia A | |
Fabrication of fiber-optic broadband ultrasound emitters by micro-opto-mechanical technology | 1-gen-2014 | Belsito, L; Vannacci, E; Mancarella, F; Ferri, M; Veronese, G; Biagi, E; Roncaglia, Alberto; A, | |
Fabrication of high-resolution strain sensors based on wafer-level vacuum packaged MEMS resonators | 1-gen-2016 | Belsito, Luca; Ferri, Matteo; Mancarella, Fulvio; Masini, Luca; Yan, Jize; Seshia, Ashwin A.; Soga, Kenichi; Roncaglia, Alberto | |
Influence of Grain Size on the Thermoelectric Properties of Polycrystalline Silicon Nanowires | 1-gen-2015 | Suriano F;Ferri M;Moscatelli F;Mancarella F;Belsito L;Solmi S;Roncaglia A;Frabboni S;Gazzadi; G C;Narducci; D | |
Nanograin Effects on the Thermoelectric Properties of Poly-Si Nanowires | 1-gen-2013 | Neophytou, N; Zianni, X; Ferri, M; Roncaglia, A; Cerofolini, Gf; Narducci, D | |
Nanostrain Resolution Strain Sensing by Monocrystalline 3C-SiC on SOI Electrostatic MEMS Resonators | 1-gen-2019 | Belsito, L; Bosi, M; Mancarella, F; Ferri, M; Roncaglia, A | |
Phonon scattering enhancement in silicon nanolayers | 1-gen-2013 | Narducci, D; Cerofolini, G; Ferri, M; Suriano, F; Mancarella, F; Belsito, L; Solmi, S; Roncaglia, Alberto; A, | |
Phonon scattering enhancement in silicon nanolayers | 1-gen-2012 | Narducci, Dario; Cerofolini, Gianfranco; Ferri, Matteo; Suriano, Francesco; Mancarella, Fulvio; Belsito, Luca; Solmi, Sandro; Roncaglia, Alberto | |
RBS channeling analysis of ion irradiation effects in heavily doped Si:As | 1-gen-2006 | Lulli, G; Bianconi, M; Ferri, M; Fortunato, G; Mariucci, L |