We investigated the effect of F on the electrical activity of B-doped junctions in preamorphized Si. It is shown that while the carrier dose introduced by B is reduced in the presence of F, no indication of B-F complexes formation can be found and B maintains its full substitutionality. Investigations on F-enriched crystalline Si demonstrated and quantified the n-type doping of F. These results clarify that the loss of holes in junctions coimplanted with B and F is not due to a chemical interaction between B and F, but simply to a dopant compensation effect. (c) 2007 American Institute of Physics.
Fluorine counter doping effect in B-doped Si
Impellizzeri G;Mirabella S;Giannazzo F;Napolitani E;
2007
Abstract
We investigated the effect of F on the electrical activity of B-doped junctions in preamorphized Si. It is shown that while the carrier dose introduced by B is reduced in the presence of F, no indication of B-F complexes formation can be found and B maintains its full substitutionality. Investigations on F-enriched crystalline Si demonstrated and quantified the n-type doping of F. These results clarify that the loss of holes in junctions coimplanted with B and F is not due to a chemical interaction between B and F, but simply to a dopant compensation effect. (c) 2007 American Institute of Physics.File in questo prodotto:
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