A novel gas microsensor device realized using PS layer permeated with Sn-V mixed oxides is presented. The PS structure has been optimized to get the best trade-off between electrical insulation, specific surface area and mechanical strength. Moreover, for a conformable coating of the PS inner structure with a thin sensing film, a wet permeation technique has been used to co-precipitate Sn-V mixed oxides that exhibit peculiar catalytic properties towards aromatic hydrocarbons. Results on the morphological, chemical and electrical characterization of the permeated PS layer are presented and discussed.
Advanced microsensor technology using porous silicon layers permeated with Sn-V mixed oxides
Poggi a;Parisini A;Maccagnani P;
1996
Abstract
A novel gas microsensor device realized using PS layer permeated with Sn-V mixed oxides is presented. The PS structure has been optimized to get the best trade-off between electrical insulation, specific surface area and mechanical strength. Moreover, for a conformable coating of the PS inner structure with a thin sensing film, a wet permeation technique has been used to co-precipitate Sn-V mixed oxides that exhibit peculiar catalytic properties towards aromatic hydrocarbons. Results on the morphological, chemical and electrical characterization of the permeated PS layer are presented and discussed.File in questo prodotto:
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