The electrical properties of amorphous GeTe films deposited at room temperature, ion implanted, and melt-quenched have been studied. The activation energy for the mobility gap varies from 0.64, in the melt-quenched, to 0.74 eV, in the as deposited film. In all the types of amorphous, pre-annealing at temperatures below crystallization induces relaxation, increasing the resistance and the mobility gap. Pre-annealing also reduces the nucleation rate for crystallization by a factor up to 4. A model is proposed, describing the competing processes of structural relaxation and crystallization, as governed by a population of sub-critical nuclei formed by medium range ordered regions.

Impact of annealing induced structural relaxation on the electrical properties and the crystallization kinetics of amorphous GeTe films

Privitera S;Mio AM;D'Arrigo G;Rimini E
2013

Abstract

The electrical properties of amorphous GeTe films deposited at room temperature, ion implanted, and melt-quenched have been studied. The activation energy for the mobility gap varies from 0.64, in the melt-quenched, to 0.74 eV, in the as deposited film. In all the types of amorphous, pre-annealing at temperatures below crystallization induces relaxation, increasing the resistance and the mobility gap. Pre-annealing also reduces the nucleation rate for crystallization by a factor up to 4. A model is proposed, describing the competing processes of structural relaxation and crystallization, as governed by a population of sub-critical nuclei formed by medium range ordered regions.
2013
Istituto per la Microelettronica e Microsistemi - IMM
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/250002
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