We report on the synthesis of SiC nanowires (NWs) using iron as catalyst. The NWs were grown on silicon substrate by vapour-liquid-solid (VLS) mechanism with propane and silane as precursors, both diluted 3% in hydrogen, and hydrogen as carrier gas.,The growth temperature was 1250°C, to reach the eutectic value of the Si-Fe alloy and to permit the VLS mechanism. The as-grown SiC nanowires were characterized by scanning and transmission electron microscopy.,The nanowires are from 30 to 100 nm in diameter and several jim in length, with <111> growth direction.
SiC NWs grown on silicon substrate using Fe as catalyst
Lagonegro P;Bosi M;Attolini G;Negri M;Dhanabalan S C;Rossi F;Boschi F;Besagni T;Salviati G
2015
Abstract
We report on the synthesis of SiC nanowires (NWs) using iron as catalyst. The NWs were grown on silicon substrate by vapour-liquid-solid (VLS) mechanism with propane and silane as precursors, both diluted 3% in hydrogen, and hydrogen as carrier gas.,The growth temperature was 1250°C, to reach the eutectic value of the Si-Fe alloy and to permit the VLS mechanism. The as-grown SiC nanowires were characterized by scanning and transmission electron microscopy.,The nanowires are from 30 to 100 nm in diameter and several jim in length, with <111> growth direction.File in questo prodotto:
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