In this paper, the basic principles of Near-Field Microscopy will be reviewed with focus on the micro- and nano-scale resolution configurations for material science measurements. Results on doping profile, dielectric and magnetic properties will be presented, with details on the calibration protocols needed for quantitative estimation of the dielectric constant and of the permeability

Near-field microwave techniques for micro- and nano-scale characterization in materials science

Marcelli R;Lucibello A;Capoccia G;Proietti E;Sardi G M;Michalas L;Bartolucci G;
2017

Abstract

In this paper, the basic principles of Near-Field Microscopy will be reviewed with focus on the micro- and nano-scale resolution configurations for material science measurements. Results on doping profile, dielectric and magnetic properties will be presented, with details on the calibration protocols needed for quantitative estimation of the dielectric constant and of the permeability
2017
Istituto per la Microelettronica e Microsistemi - IMM
978-1-5090-3985-2
Microwave measurement
Silicon
Microwave imaging
Dielectric meas
Microwave circuits
Transmission line measurements
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/422411
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