In this paper, the basic principles of Near-Field Microscopy will be reviewed with focus on the micro- and nano-scale resolution configurations for material science measurements. Results on doping profile, dielectric and magnetic properties will be presented, with details on the calibration protocols needed for quantitative estimation of the dielectric constant and of the permeability

Near-field microwave techniques for micro- and nano-scale characterization in materials science

Marcelli R;Lucibello A;Capoccia G;Proietti E;Sardi G M;Michalas L;Bartolucci G;
2017

Abstract

In this paper, the basic principles of Near-Field Microscopy will be reviewed with focus on the micro- and nano-scale resolution configurations for material science measurements. Results on doping profile, dielectric and magnetic properties will be presented, with details on the calibration protocols needed for quantitative estimation of the dielectric constant and of the permeability
2017
Istituto per la Microelettronica e Microsistemi - IMM
Inglese
2017 International Semiconductor Conference (CAS)
29
36
978-1-5090-3985-2
https://ieeexplore.ieee.org/abstract/document/8101147
IEEE
New York
STATI UNITI D'AMERICA
Sì, ma tipo non specificato
11-14/10/2017
Microwave measurement
Silicon
Microwave imaging
Dielectric meas
Microwave circuits
Transmission line measurements
8
none
Marcelli, R.; Lucibello, A.; Capoccia, G.; Proietti, E.; Sardi, G. M.; Joseph, C. H.; Michalas, L.; Bartolucci, G.; Kienberger, F.; Gramse, G....espandi
273
info:eu-repo/semantics/conferenceObject
04 Contributo in convegno::04.01 Contributo in Atti di convegno
   Microwave Nanotechnology for Semiconductor and Life Sciences
   NANOMICROWAVE
   FP7
   317116
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/422411
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