Single layers of graphene obtained by mechanicla exfoliation of highly oriented pyrolytic graphite and deposited on a SiO2/n Si substrate were irradiated with high energy (500 keV) C ions Controlled amounts of defects were introduced in graphene by a precise control of the ion fluence ranging grom 1 x 10(13) to 1 x 10(14) cm(-2). Scanning capacitance spectroscopy (SCS) was used as non-destructive characterization technique to probe the effect of irradiation defects on the electrical properties of graphene. A wider variation between the capacitance curves measured at different positions on irradiated graphene is found in comparison with the pristine graphene. The quantum capacitance per unit area C-q' was extracted from raw data. In particular an increase of C-q' is associated to the damaged regions.

Nanoscale capacitive behaviour of ion irradiated graphene on silicon oxide substrate

Giannazzo F;Raineri V;
2010

Abstract

Single layers of graphene obtained by mechanicla exfoliation of highly oriented pyrolytic graphite and deposited on a SiO2/n Si substrate were irradiated with high energy (500 keV) C ions Controlled amounts of defects were introduced in graphene by a precise control of the ion fluence ranging grom 1 x 10(13) to 1 x 10(14) cm(-2). Scanning capacitance spectroscopy (SCS) was used as non-destructive characterization technique to probe the effect of irradiation defects on the electrical properties of graphene. A wider variation between the capacitance curves measured at different positions on irradiated graphene is found in comparison with the pristine graphene. The quantum capacitance per unit area C-q' was extracted from raw data. In particular an increase of C-q' is associated to the damaged regions.
2010
Istituto per la Microelettronica e Microsistemi - IMM
File in questo prodotto:
Non ci sono file associati a questo prodotto.

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/50608
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus ND
  • ???jsp.display-item.citation.isi??? 6
social impact