Nowadays, the scientific community and industry are increasingly pressed to provide solutions for developing compact and highly-performing trace-gas sensors for several applications of crucial importance, such as environmental monitoring or medical diagnostics. In this context, this work describes a novel configuration, making use of a mid-IR spectrophone combining the compactness of a photo-acoustic setup, a non-conventional micro-electro-mechanical (MEMS) acousto-to-voltage transducer, and the sensitivity enhancement given by a cost-effective and easy-to-build dual-tube resonator configuration. In the optimal condition of sample pressure, the system developed in this work can achieve a minimum detection limit (MDL) equal to 0.34 ppb when averaging up to 10 s. Compared with previous literature of single-pass photoacoustic-based sensors for N2O, this corresponds to a significant improvement both for the achieved normalized noise equivalent absorption coefficient (NNEA) equal to 1.41 × 10−9 cm−1WHz−1/2, and for a Noise-Equivalent-Concentration (NEC) of 1 ppb obtained at 1 s of averaging time.

Dual-tube MEMS-based spectrophone for sub-ppb mid-IR photoacoustic gas detection

Dello Russo, Stefano;Pelini, Jacopo;Lopez Garcia, Inaki;Canino, Maria Concetta;Roncaglia, Alberto;Cancio Pastor, Pablo;Galli, Iacopo;De Natale, Paolo;Borri, Simone;Siciliani de Cumis, Mario
2024

Abstract

Nowadays, the scientific community and industry are increasingly pressed to provide solutions for developing compact and highly-performing trace-gas sensors for several applications of crucial importance, such as environmental monitoring or medical diagnostics. In this context, this work describes a novel configuration, making use of a mid-IR spectrophone combining the compactness of a photo-acoustic setup, a non-conventional micro-electro-mechanical (MEMS) acousto-to-voltage transducer, and the sensitivity enhancement given by a cost-effective and easy-to-build dual-tube resonator configuration. In the optimal condition of sample pressure, the system developed in this work can achieve a minimum detection limit (MDL) equal to 0.34 ppb when averaging up to 10 s. Compared with previous literature of single-pass photoacoustic-based sensors for N2O, this corresponds to a significant improvement both for the achieved normalized noise equivalent absorption coefficient (NNEA) equal to 1.41 × 10−9 cm−1WHz−1/2, and for a Noise-Equivalent-Concentration (NEC) of 1 ppb obtained at 1 s of averaging time.
2024
Istituto per la Microelettronica e Microsistemi - IMM
Istituto Nazionale di Ottica - INO
Acoustic enhancement
Dual tube configuration
Micro-electro-mechanical system (MEMS)
Minimum detection limit
Photo-acoustic spectroscopy
Sub-part-per-billion
Trace-gas sensor
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/516989
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