The morphology of gold nanoclusters deposited on the SiO2 surface and irradiated by 200 keV-Ar+ ion beam at room temperature was investigated by atomic force microscopy and transmission electron microscopy. The possibility of controlling the Au clusters size and size distribution by an appropriate choice of the process parameters was demonstrated and, in particular, the effects of ion flux and fluence was studied. The experimental data were modelled by clusters ripening and inverse ripening theory taking into account the sputtering process of the gold atoms from the surface by ion irradiation. (c) 2007 Elsevier B.V. All rights reserved.

Self-organization of Au nanoclusters on the SiO2 surface induced by 200 keV-Ar+ irradiation

Ruffino F;Bongiorno C;Giannazzo F;Roccaforte F;Raineri V
2007

Abstract

The morphology of gold nanoclusters deposited on the SiO2 surface and irradiated by 200 keV-Ar+ ion beam at room temperature was investigated by atomic force microscopy and transmission electron microscopy. The possibility of controlling the Au clusters size and size distribution by an appropriate choice of the process parameters was demonstrated and, in particular, the effects of ion flux and fluence was studied. The experimental data were modelled by clusters ripening and inverse ripening theory taking into account the sputtering process of the gold atoms from the surface by ion irradiation. (c) 2007 Elsevier B.V. All rights reserved.
2007
Istituto per la Microelettronica e Microsistemi - IMM
INFM
nanoparticle
ion irradiation
ripening
inverse ripening
sputtering
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/148180
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