In this study we examined the structural evolution of graphene grown on 8° off-axis 4H-SiC(0001) substrates at temperatures from 1600°C to 1700°C in Ar ambient. Morphological transformation of SiC substrate after annealing was examined by Tapping Mode Atomic Force Microscopy. Moreover, by etching-out graphene layers from graphitized SiC substrates in selective trenches we determined the number of graphene layers. Numbers of graphene layers were then independently confirmed by Transmission Electron Microscopy imaging. (c) (2011) Trans Tech Publications.

Temperature dependent structural evolution of graphene layers on 4H-SiC(0001)

Giannazzo;Bongiorno;Di Franco;Sa;Rimini;Raineri;Va
2011

Abstract

In this study we examined the structural evolution of graphene grown on 8° off-axis 4H-SiC(0001) substrates at temperatures from 1600°C to 1700°C in Ar ambient. Morphological transformation of SiC substrate after annealing was examined by Tapping Mode Atomic Force Microscopy. Moreover, by etching-out graphene layers from graphitized SiC substrates in selective trenches we determined the number of graphene layers. Numbers of graphene layers were then independently confirmed by Transmission Electron Microscopy imaging. (c) (2011) Trans Tech Publications.
2011
Istituto per la Microelettronica e Microsistemi - IMM
Epitaxial graphene
Graphene layers
Morphological transformations
Off-axis
SiC substrates
Structural evolution
Tapping-mode atomic force microscopy
Temperature dependent
Atomic force microscopy
Epitaxial growth
Silicon carbide
Substrates
Transmission electron microscopy
Graphene
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/247205
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