In this article, using finite element simulations and analytical approaches, we demonstrate that planar rotators [1] can be effectively used to determine both the uniform and gradient residual stresses in thin films with higher accuracy compared to other microstructures.
Complete determination of the local stress field in epitaxial thin films using single microstructure
Anzalone Ruggero;Piluso Nico;La Magna Antonino;La Via Francesco
2011
Abstract
In this article, using finite element simulations and analytical approaches, we demonstrate that planar rotators [1] can be effectively used to determine both the uniform and gradient residual stresses in thin films with higher accuracy compared to other microstructures.File in questo prodotto:
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