The nanometric localization of current transport in heterogeneous Schottky barriers was obtained by the combination of the electric field localization at the apex of a biased conductive atomic force microscopy (c-AFM) tip and of the metal films high-resistivity properties. An abrupt increase of the resistivity, modeled by a quantum-mechanical approach, was measured in Au thin films with a thickness below 10 nm. For Au ultrathin film resistivity, exceeding by two orders of magnitude the bulk value, the nanometric localization of the current transport occurs. This physical effect represents the basic principle of a microscopy approch for two-dimensional Schottky barrier height mapping, which is alternative to conventional ballistic electron emission microscopy ( BEEM). A spatial resolution in the order of the tip diameter ( 10 - 20 nm) is demonstrated by considering the realistic description of the system ( physical and geometrical). Schottky barrier inhomogeneities in a Au/4H-SiC system were imaged with an energy resolution better than 0.1 eV.

Transport localization in heterogeneous Schottky barriers of quantum-defined metal films

Giannazzo F;Roccaforte F;Raineri V;
2006

Abstract

The nanometric localization of current transport in heterogeneous Schottky barriers was obtained by the combination of the electric field localization at the apex of a biased conductive atomic force microscopy (c-AFM) tip and of the metal films high-resistivity properties. An abrupt increase of the resistivity, modeled by a quantum-mechanical approach, was measured in Au thin films with a thickness below 10 nm. For Au ultrathin film resistivity, exceeding by two orders of magnitude the bulk value, the nanometric localization of the current transport occurs. This physical effect represents the basic principle of a microscopy approch for two-dimensional Schottky barrier height mapping, which is alternative to conventional ballistic electron emission microscopy ( BEEM). A spatial resolution in the order of the tip diameter ( 10 - 20 nm) is demonstrated by considering the realistic description of the system ( physical and geometrical). Schottky barrier inhomogeneities in a Au/4H-SiC system were imaged with an energy resolution better than 0.1 eV.
2006
Istituto per la Microelettronica e Microsistemi - IMM
Schottky contacts
thin metal films
silicon carbide
Conductive atomic force microscopy
File in questo prodotto:
Non ci sono file associati a questo prodotto.

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/438294
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus ND
  • ???jsp.display-item.citation.isi??? 52
social impact